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Interconnects A (SmolGROW™)

The Interconnects A family is covering a method regarding controlled growth of a nanostructure on a substrate, and electron emission devices based on the same.

S Kabir • April 25, 2006

A method of form­ing of nanos­truc­tures and nanos­truc­ture devices — A tru­ly unique nanos­truc­ture growth plat­form tech­nol­o­gy that enables man­u­fac­tur­ing of nano­ma­te­r­i­al devices on CMOS plat­form. The method cov­ers dif­fer­ent types of nanos­truc­tures includ­ing car­bon nan­otubes, nanofibers, nanowires, etc.

The present inven­tion pro­vides a method for nanos­truc­tures grown on a met­al under­lay­er, and a method of mak­ing the same. The grown nanos­truc­tures based on the claimed method are suit­able for man­u­fac­tur­ing elec­tron­ic devices such as an elec­tron beam writer, and a field emis­sion display.

Down­load the patent grant­ed by EPO.

Granted patents relating to the innovation

Patent OfficePatent
EuropeEP1874986
EuropeEP2586744
IndiaIN264325
JapanJP5349956
South KoreaKR101361946
USAUS7687876
USAUS7977761
For more infor­ma­tion about a par­tic­u­lar patent, click on its name to view it on Google Patents.

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